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MEMS 진동 센서

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VS1000 Low-noise 진동 센서
VS1000은 직류에서 중간 주파수까지의 진동 측정을 위해 특별히 설계된 고 용량성 MEMS 센서입니다. VS1000은 낮은 소음, 반복적인 강한 충격에 대한 저항성, 온도에 둔감함 덕분에 가혹한 환경조건에서도 안전하고 정확한 진동 측정을 보장합니다.
주요성능
◾ Large and flat frequency response from DC to 7000 Hz (±3dB, typ)
◾ Embedded self-test, temperature sensor
◾ Brownout protection for confident usage
◾ Very low noise (in band): 7 μg/√Hz for ±2g range (typ)
◾ Measurement range : ± 2 g, ± 5 g, ± 10 g, ± 30 g, ± 50 g, ± 100 g, ± 200 g
Application
◾ Bogie monitoring
◾ Instrumentation
◾ Automotive testing (ride quality, durability, ride & NVH, head rest vibration)
  • Ranges & performances
  VS1002 VS1005 VS1010 VS1030 VS1050 VS1100 VS1200 Unit
Full-scale acceleration ±2 ±5 ±10 ±30 ±50 ±100 ±200 g
Frequency response(±5%) 0-700 0-1150 0-2000 0-2300 0-2700 0-2900 0-2500 Hz
Frequency response(±3dB) 0-1150 0-1900 0-3200 0-4000 0-4500 0-5000 0-7000 Hz
Non-linearity(full scale) 0.1 0.1 0.1 0.1 0.1 0.1 0.1 %
Noise(In band) 7 17 34 102 170 339 678 μg/√Hz
Scale factor(normal) 1'350 540 270 90 54 27 13.5 mV/g
Scale factor temperature coefficient) 120 120 120 120 120 120 120 ppm/℃
Bias temp. coefficient(min./max.) ±0.2 ±0.5 ±1 ±3 ±5 ±10 ±20 mg/℃
Shock survivability 6'000 6'000 6'000 6'000 6'000 6'000 6'000 g

문의처 : 민승현 과장, TEL02-556-5288 , e-mail : leomin@midoriya.co.jp